Michael D. Shumway
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M04/49
December 2004
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/ERL-04-49.pdf
Advisor: Jeffrey Bokor
BibTeX citation:
@phdthesis{Shumway:M04/49, Author = {Shumway, Michael D.}, Title = {Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques}, School = {EECS Department, University of California, Berkeley}, Year = {2004}, Month = {Dec}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4279.html}, Number = {UCB/ERL M04/49} }
EndNote citation:
%0 Thesis %A Shumway, Michael D. %T Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques %I EECS Department, University of California, Berkeley %D 2004 %@ UCB/ERL M04/49 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4279.html %F Shumway:M04/49