Michael D. Shumway

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M04/49

, 2004

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/ERL-04-49.pdf

Advisors: Jeffrey Bokor

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BibTeX citation:

@phdthesis{Shumway:M04/49,
    Author= {Shumway, Michael D.},
    Title= {Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques},
    School= {EECS Department, University of California, Berkeley},
    Year= {2004},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4279.html},
    Number= {UCB/ERL M04/49},
}

EndNote citation:

%0 Thesis
%A Shumway, Michael D. 
%T Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques
%I EECS Department, University of California, Berkeley
%D 2004
%@ UCB/ERL M04/49
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4279.html
%F Shumway:M04/49