J. P. Cain

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M04/50

, 2004

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/ERL-04-50.pdf

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BibTeX citation:

@techreport{Cain:M04/50,
    Author= {Cain, J. P.},
    Title= {Characterization of the Critical Dimension},
    Year= {2004},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4280.html},
    Number= {UCB/ERL M04/50},
}

EndNote citation:

%0 Report
%A Cain, J. P. 
%T Characterization of the Critical Dimension
%I EECS Department, University of California, Berkeley
%D 2004
%@ UCB/ERL M04/50
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4280.html
%F Cain:M04/50