Characterization of the Critical Dimension

J. P. Cain

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M04/50
December 2004

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/ERL-04-50.pdf

BibTeX citation:

@techreport{Cain:M04/50,
    Author = {Cain, J. P.},
    Title = {Characterization of the Critical Dimension},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2004},
    Month = {Dec},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4280.html},
    Number = {UCB/ERL M04/50}
}

EndNote citation:

%0 Report
%A Cain, J. P.
%T Characterization of the Critical Dimension
%I EECS Department, University of California, Berkeley
%D 2004
%@ UCB/ERL M04/50
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4280.html
%F Cain:M04/50