Yijian Chen

EECS Department, University of California, Berkeley

2004

Advisors: William G. Oldham

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BibTeX citation:

@phdthesis{Chen:8349,
    Author= {Chen, Yijian},
    Title= {Dynamics, Control and Fabrication of Micromirrors for Maskless Lithography},
    School= {EECS Department, University of California, Berkeley},
    Year= {2004},
}

EndNote citation:

%0 Thesis
%A Chen, Yijian 
%T Dynamics, Control and Fabrication of Micromirrors for Maskless Lithography
%I EECS Department, University of California, Berkeley
%D 2004
%F Chen:8349