Jason P. Cain

EECS Department, University of California, Berkeley

2004

Advisors: Costas J. Spanos

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BibTeX citation:

@phdthesis{Cain:8488,
    Author= {Cain, Jason P.},
    Title= {Characterization of the Critical Dimension Error Budget for Extreme Ultraviolet Lithography},
    School= {EECS Department, University of California, Berkeley},
    Year= {2004},
}

EndNote citation:

%0 Thesis
%A Cain, Jason P. 
%T Characterization of the Critical Dimension Error Budget for Extreme Ultraviolet Lithography
%I EECS Department, University of California, Berkeley
%D 2004
%F Cain:8488