Modeling Innovations in EUV and Nanoimprint Lithography

Yunfei Deng

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M05/27
June 2005

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/ERL-05-27.pdf

BibTeX citation:

@techreport{Deng:M05/27,
    Author = {Deng, Yunfei},
    Title = {Modeling Innovations in EUV and Nanoimprint Lithography},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2005},
    Month = {Jun},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/28948.html},
    Number = {UCB/ERL M05/27}
}

EndNote citation:

%0 Report
%A Deng, Yunfei
%T Modeling Innovations in EUV and Nanoimprint Lithography
%I EECS Department, University of California, Berkeley
%D 2005
%@ UCB/ERL M05/27
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/28948.html
%F Deng:M05/27