Yunfei Deng

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M05/27

, 2005

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/ERL-05-27.pdf

---

BibTeX citation:

@techreport{Deng:M05/27,
    Author= {Deng, Yunfei},
    Title= {Modeling Innovations in EUV and Nanoimprint Lithography},
    Year= {2005},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/28948.html},
    Number= {UCB/ERL M05/27},
}

EndNote citation:

%0 Report
%A Deng, Yunfei 
%T Modeling Innovations in EUV and Nanoimprint Lithography
%I EECS Department, University of California, Berkeley
%D 2005
%@ UCB/ERL M05/27
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/28948.html
%F Deng:M05/27