Ignition Conditions for Peripheral Plasma in a Grounded Chamber Connected to a Dual Frequency Capactive Discharge
Michael A. Lieberman and Allan J. Lichtenberg and S. Kim and J. T. Gudmundsson
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M05/10
, 2005
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/ERL-05-10.pdf
BibTeX citation:
@techreport{Lieberman:M05/10, Author= {Lieberman, Michael A. and Lichtenberg, Allan J. and Kim, S. and Gudmundsson, J. T.}, Title= {Ignition Conditions for Peripheral Plasma in a Grounded Chamber Connected to a Dual Frequency Capactive Discharge}, Year= {2005}, Month= {Mar}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/4298.html}, Number= {UCB/ERL M05/10}, }
EndNote citation:
%0 Report %A Lieberman, Michael A. %A Lichtenberg, Allan J. %A Kim, S. %A Gudmundsson, J. T. %T Ignition Conditions for Peripheral Plasma in a Grounded Chamber Connected to a Dual Frequency Capactive Discharge %I EECS Department, University of California, Berkeley %D 2005 %@ UCB/ERL M05/10 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/4298.html %F Lieberman:M05/10