Yunfei Deng

EECS Department, University of California, Berkeley

2005

Advisors: Andrew R. Neureuther

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BibTeX citation:

@phdthesis{Deng:8299,
    Author= {Deng, Yunfei},
    Title= {Modeling Innovations in EUV and Nanoimprint Lithography},
    School= {EECS Department, University of California, Berkeley},
    Year= {2005},
}

EndNote citation:

%0 Thesis
%A Deng, Yunfei 
%T Modeling Innovations in EUV and Nanoimprint Lithography
%I EECS Department, University of California, Berkeley
%D 2005
%F Deng:8299