Piezoelectric Alumninum Nitride Vibrating RF MEMS for Radio Front-End Technology
Gianluca Piazza
EECS Department, University of California, Berkeley
2005
Advisors: Albert Pisano
BibTeX citation:
@phdthesis{Piazza:8321, Author= {Piazza, Gianluca}, Title= {Piezoelectric Alumninum Nitride Vibrating RF MEMS for Radio Front-End Technology}, School= {EECS Department, University of California, Berkeley}, Year= {2005}, }
EndNote citation:
%0 Thesis %A Piazza, Gianluca %T Piezoelectric Alumninum Nitride Vibrating RF MEMS for Radio Front-End Technology %I EECS Department, University of California, Berkeley %D 2005 %F Piazza:8321