Applying Drop-On-Demand Inkjet Printing Method to Maskless Lithography
Yan Wang
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M05/17
, 2005
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/ERL-05-17.pdf
Advisors: Jeffrey Bokor
BibTeX citation:
@phdthesis{Wang:M05/17, Author= {Wang, Yan}, Title= {Applying Drop-On-Demand Inkjet Printing Method to Maskless Lithography}, School= {EECS Department, University of California, Berkeley}, Year= {2005}, Month= {May}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/8333.html}, Number= {UCB/ERL M05/17}, }
EndNote citation:
%0 Thesis %A Wang, Yan %T Applying Drop-On-Demand Inkjet Printing Method to Maskless Lithography %I EECS Department, University of California, Berkeley %D 2005 %@ UCB/ERL M05/17 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/8333.html %F Wang:M05/17