Applying Drop-On-Demand Inkjet Printing Method to Maskless Lithography

Yan Wang

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M05/17

2005

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/Archive/ERL-05-17.pdf

Advisors: Jeffrey Bokor

BibTeX citation:

@phdthesis{Wang:M05/17,
    Author= {Wang, Yan},
    Title= {Applying Drop-On-Demand Inkjet Printing Method to Maskless Lithography},
    School= {EECS Department, University of California, Berkeley},
    Year= {2005},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/8333.html},
    Number= {UCB/ERL M05/17},
}

EndNote citation:

%0 Thesis
%A Wang, Yan 
%T Applying Drop-On-Demand Inkjet Printing Method to Maskless Lithography
%I EECS Department, University of California, Berkeley
%D 2005
%@ UCB/ERL M05/17
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2005/8333.html
%F Wang:M05/17