MEMS-Based System for Particle Exposure Assessment Using Thin-Film Bulk Acoustic Wave Resonators and IR / UV Optical Discrimination

Justin Phelps Black

EECS Department, University of California, Berkeley

Technical Report No. UCB/EECS-2006-193

December 22, 2006

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2006/Archive/EECS-2006-193.pdf

Advisors: Richard M. White

BibTeX citation:

@phdthesis{Black:EECS-2006-193,
    Author= {Black, Justin Phelps},
    Title= {MEMS-Based System for Particle Exposure Assessment Using Thin-Film Bulk Acoustic Wave Resonators and IR / UV Optical Discrimination},
    School= {EECS Department, University of California, Berkeley},
    Year= {2006},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2006/EECS-2006-193.html},
    Number= {UCB/EECS-2006-193},
}

EndNote citation:

%0 Thesis
%A Black, Justin Phelps 
%T MEMS-Based System for Particle Exposure Assessment Using Thin-Film Bulk Acoustic Wave Resonators and IR / UV Optical Discrimination
%I EECS Department, University of California, Berkeley
%D 2006
%8 December 22
%@ UCB/EECS-2006-193
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2006/EECS-2006-193.html
%F Black:EECS-2006-193