Methods and Devices for Optical and Electrical Metrology with Application to Phase-Shifting Interferometers, Torsional Microstructures, and Levitated Accelerometers
David G Garmire
EECS Department, University of California, Berkeley
Technical Report No. UCB/EECS-2007-118
September 20, 2007
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-118.pdf
Advisors: James Demmel
BibTeX citation:
@phdthesis{Garmire:EECS-2007-118, Author= {Garmire, David G}, Title= {Methods and Devices for Optical and Electrical Metrology with Application to Phase-Shifting Interferometers, Torsional Microstructures, and Levitated Accelerometers}, School= {EECS Department, University of California, Berkeley}, Year= {2007}, Month= {Sep}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-118.html}, Number= {UCB/EECS-2007-118}, }
EndNote citation:
%0 Thesis %A Garmire, David G %T Methods and Devices for Optical and Electrical Metrology with Application to Phase-Shifting Interferometers, Torsional Microstructures, and Levitated Accelerometers %I EECS Department, University of California, Berkeley %D 2007 %8 September 20 %@ UCB/EECS-2007-118 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-118.html %F Garmire:EECS-2007-118