Methods and Devices for Optical and Electrical Metrology with Application to Phase-Shifting Interferometers, Torsional Microstructures, and Levitated Accelerometers

David G Garmire

EECS Department
University of California, Berkeley
Technical Report No. UCB/EECS-2007-118
September 20, 2007

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-118.pdf

Advisor: James Demmel


BibTeX citation:

@phdthesis{Garmire:EECS-2007-118,
    Author = {Garmire, David G},
    Title = {Methods and Devices for Optical and Electrical Metrology with Application to Phase-Shifting Interferometers, Torsional Microstructures, and Levitated Accelerometers},
    School = {EECS Department, University of California, Berkeley},
    Year = {2007},
    Month = {Sep},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-118.html},
    Number = {UCB/EECS-2007-118}
}

EndNote citation:

%0 Thesis
%A Garmire, David G
%T Methods and Devices for Optical and Electrical Metrology with Application to Phase-Shifting Interferometers, Torsional Microstructures, and Levitated Accelerometers
%I EECS Department, University of California, Berkeley
%D 2007
%8 September 20
%@ UCB/EECS-2007-118
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-118.html
%F Garmire:EECS-2007-118