Devices, Structures, and Processes for Optical MEMS
Hyuck Choo
EECS Department, University of California, Berkeley
Technical Report No. UCB/EECS-2007-50
May 5, 2007
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-50.pdf
Advisors: Richard S. Muller
BibTeX citation:
@phdthesis{Choo:EECS-2007-50, Author= {Choo, Hyuck}, Title= {Devices, Structures, and Processes for Optical MEMS}, School= {EECS Department, University of California, Berkeley}, Year= {2007}, Month= {May}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-50.html}, Number= {UCB/EECS-2007-50}, }
EndNote citation:
%0 Thesis %A Choo, Hyuck %T Devices, Structures, and Processes for Optical MEMS %I EECS Department, University of California, Berkeley %D 2007 %8 May 5 %@ UCB/EECS-2007-50 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2007/EECS-2007-50.html %F Choo:EECS-2007-50