Joanna Lai

EECS Department, University of California, Berkeley

Technical Report No. UCB/EECS-2008-173

December 19, 2008

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2008/EECS-2008-173.pdf

Advisors: Tsu-Jae King Liu

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BibTeX citation:

@phdthesis{Lai:EECS-2008-173,
    Author= {Lai, Joanna},
    Title= {Novel Processes and Structures for Low Temperature Fabrication of Integrated Circuit Devices},
    School= {EECS Department, University of California, Berkeley},
    Year= {2008},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2008/EECS-2008-173.html},
    Number= {UCB/EECS-2008-173},
}

EndNote citation:

%0 Thesis
%A Lai, Joanna 
%T Novel Processes and Structures for Low Temperature Fabrication of Integrated Circuit Devices
%I EECS Department, University of California, Berkeley
%D 2008
%8 December 19
%@ UCB/EECS-2008-173
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2008/EECS-2008-173.html
%F Lai:EECS-2008-173