Data Compression for Maskless Lithography Systems: Architecture, Algorithms and Implementation
Vito Dai
EECS Department, University of California, Berkeley
Technical Report No. UCB/EECS-2008-55
May 19, 2008
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2008/EECS-2008-55.pdf
Advisors: Avideh Zakhor
BibTeX citation:
@phdthesis{Dai:EECS-2008-55, Author= {Dai, Vito}, Title= {Data Compression for Maskless Lithography Systems: Architecture, Algorithms and Implementation}, School= {EECS Department, University of California, Berkeley}, Year= {2008}, Month= {May}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2008/EECS-2008-55.html}, Number= {UCB/EECS-2008-55}, }
EndNote citation:
%0 Thesis %A Dai, Vito %T Data Compression for Maskless Lithography Systems: Architecture, Algorithms and Implementation %I EECS Department, University of California, Berkeley %D 2008 %8 May 19 %@ UCB/EECS-2008-55 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2008/EECS-2008-55.html %F Dai:EECS-2008-55