Jing Xue

EECS Department, University of California, Berkeley

Technical Report No. UCB/EECS-2009-88

May 29, 2009

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2009/EECS-2009-88.pdf

Advisors: Costas J. Spanos

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BibTeX citation:

@phdthesis{Xue:EECS-2009-88,
    Author= {Xue, Jing},
    Title= {In-Situ, Portable Monitoring Methods for Photolithography Characterization},
    School= {EECS Department, University of California, Berkeley},
    Year= {2009},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2009/EECS-2009-88.html},
    Number= {UCB/EECS-2009-88},
}

EndNote citation:

%0 Thesis
%A Xue, Jing 
%T In-Situ, Portable Monitoring Methods for Photolithography Characterization
%I EECS Department, University of California, Berkeley
%D 2009
%8 May 29
%@ UCB/EECS-2009-88
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2009/EECS-2009-88.html
%F Xue:EECS-2009-88