Modeling and Selection for Real-time Wafer-to-Wafer Fault Detection Applications

Jae Yeon (Claire) Baek

EECS Department
University of California, Berkeley
Technical Report No. UCB/EECS-2015-215
December 1, 2015

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2015/EECS-2015-215.pdf

Advisor: Costas J. Spanos


BibTeX citation:

@phdthesis{Baek:EECS-2015-215,
    Author = {Baek, Jae Yeon (Claire)},
    Title = {Modeling and Selection for Real-time Wafer-to-Wafer Fault Detection Applications},
    School = {EECS Department, University of California, Berkeley},
    Year = {2015},
    Month = {Dec},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2015/EECS-2015-215.html},
    Number = {UCB/EECS-2015-215}
}

EndNote citation:

%0 Thesis
%A Baek, Jae Yeon (Claire)
%T Modeling and Selection for Real-time Wafer-to-Wafer Fault Detection Applications
%I EECS Department, University of California, Berkeley
%D 2015
%8 December 1
%@ UCB/EECS-2015-215
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2015/EECS-2015-215.html
%F Baek:EECS-2015-215