Thin-Film Electrostatic Actuators and Adhesives for High-Voltage Robotics

Ethan Schaler

EECS Department
University of California, Berkeley
Technical Report No. UCB/EECS-2018-58
May 11, 2018

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2018/EECS-2018-58.pdf

Thin-film electrostatic actuators and adhesives operating at high-voltages have potential as light-weight, low-cost force sources in mm- to cm-scale robotics.

First, new designs for repulsive-force electrostatic actuators (RFAs) were fabricated and evaluated, including: 2-layer linear and rotary RFAs, multi-layer RFAs for increased stroke, and RFAs with work-optimized electrode geometries. Second, a new bidirectional repulsive-/attractive-force electrostatic actuator (RAFA) was introduced, which employs the RFA electrode patterns but can controllably generate either repulsive or attractive forces by simply varying two input voltages. Third, a flexible, 8-fingered robotic gripper was developed, which employs electrostatic adhesion to grasp and manipulate flexible films (such as satellite multi-layer insulation).

RFAs exhibit interesting characteristics – including stable open-loop operation and peak force at rest – and are compatible with thin-film / planar manufacturing processes. Demonstrated applications include RFA-powered 1- and 2-DoF micro-mirror systems, and a RAFA-powered 132 mg crawling robot.

Advisor: Ronald S. Fearing


BibTeX citation:

@phdthesis{Schaler:EECS-2018-58,
    Author = {Schaler, Ethan},
    Editor = {Fearing, Ronald S.},
    Title = {Thin-Film Electrostatic Actuators and Adhesives for High-Voltage Robotics},
    School = {EECS Department, University of California, Berkeley},
    Year = {2018},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2018/EECS-2018-58.html},
    Number = {UCB/EECS-2018-58},
    Abstract = {Thin-film electrostatic actuators and adhesives operating at high-voltages have potential as light-weight, low-cost force sources in mm- to cm-scale robotics. 

First, new designs for repulsive-force electrostatic actuators (RFAs) were fabricated and evaluated, including: 2-layer linear and rotary RFAs, multi-layer RFAs for increased stroke, and RFAs with work-optimized electrode geometries. Second, a new bidirectional repulsive-/attractive-force electrostatic actuator (RAFA) was introduced, which employs the RFA electrode patterns but can controllably generate either repulsive or attractive forces by simply varying two input voltages. Third, a flexible, 8-fingered robotic gripper was developed, which employs electrostatic adhesion to grasp and manipulate flexible films (such as satellite multi-layer insulation). 

RFAs exhibit interesting characteristics – including stable open-loop operation and peak force at rest – and are compatible with thin-film / planar manufacturing processes. Demonstrated applications include RFA-powered 1- and 2-DoF micro-mirror systems, and a RAFA-powered 132 mg crawling robot.}
}

EndNote citation:

%0 Thesis
%A Schaler, Ethan
%E Fearing, Ronald S.
%T Thin-Film Electrostatic Actuators and Adhesives for High-Voltage Robotics
%I EECS Department, University of California, Berkeley
%D 2018
%8 May 11
%@ UCB/EECS-2018-58
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2018/EECS-2018-58.html
%F Schaler:EECS-2018-58