High-Q Strong Coupling Capacitive-Gap Transduced RF Micromechanical Resonators

Alper Ozgurluk

EECS Department
University of California, Berkeley
Technical Report No. UCB/EECS-2020-6
January 10, 2020

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2020/EECS-2020-6.pdf

Advisor: Clark Nguyen


BibTeX citation:

@phdthesis{Ozgurluk:EECS-2020-6,
    Author = {Ozgurluk, Alper},
    Editor = {Nguyen, Clark},
    Title = {High-Q Strong Coupling Capacitive-Gap Transduced RF Micromechanical Resonators},
    School = {EECS Department, University of California, Berkeley},
    Year = {2020},
    Month = {Jan},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2020/EECS-2020-6.html},
    Number = {UCB/EECS-2020-6}
}

EndNote citation:

%0 Thesis
%A Ozgurluk, Alper
%E Nguyen, Clark
%T High-Q Strong Coupling Capacitive-Gap Transduced RF Micromechanical Resonators
%I EECS Department, University of California, Berkeley
%D 2020
%8 January 10
%@ UCB/EECS-2020-6
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2020/EECS-2020-6.html
%F Ozgurluk:EECS-2020-6