Specifying Integrated Circuit Photolithography Processes Using Heuristic and Algorithmic Techniques (Computer-Aided Design, Expert System)

Michael F. Klein

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M85/73
September 1985

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/ERL-85-73.pdf

Advisor: David A. Hodges

BibTeX citation:

@phdthesis{Klein:M85/73,
    Author = {Klein, Michael F.},
    Title = {Specifying Integrated Circuit Photolithography Processes Using Heuristic and Algorithmic Techniques (Computer-Aided Design, Expert System)},
    School = {EECS Department, University of California, Berkeley},
    Year = {1985},
    Month = {Sep},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/560.html},
    Number = {UCB/ERL M85/73}
}

EndNote citation:

%0 Thesis
%A Klein, Michael F.
%T Specifying Integrated Circuit Photolithography Processes Using Heuristic and Algorithmic Techniques (Computer-Aided Design, Expert System)
%I EECS Department, University of California, Berkeley
%D 1985
%@ UCB/ERL M85/73
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/560.html
%F Klein:M85/73