Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/62
September 1988
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-62.pdf
BibTeX citation:
@techreport{Lieberman:M88/62, Author = {Lieberman, Michael A.}, Title = {Dynamics of a Collisional Capacitive R.F. Sheath}, Institution = {EECS Department, University of California, Berkeley}, Year = {1988}, Month = {Sep}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1100.html}, Number = {UCB/ERL M88/62} }
EndNote citation:
%0 Report %A Lieberman, Michael A. %T Dynamics of a Collisional Capacitive R.F. Sheath %I EECS Department, University of California, Berkeley %D 1988 %@ UCB/ERL M88/62 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1100.html %F Lieberman:M88/62