Anthony Yen: Faculty Home Page

Biography

Anthony (Tony) Yen is Vice President and Head of Technology Development Center at ASML, leading a global team to work on long-term technological directions in semiconductors and on accompanying patterning solutions in close collaboration with other organizations within ASML, imec, and universities. From 1991 to 1997, he was a Member of the Technical Staff at Texas Instruments. From 1997 to 2003 and again from 2006 to 2017, he was with TSMC where he led the development of optical lithography processes and the development of EUV lithography for high-volume manufacturing. Tony’s areas of interest are near-resolution-limit imaging, nanofabrication, and semiconductor technology. He is an IEEE Fellow and the recipient of the 2025 IEEE EDS J. J. Ebers Award and the 2026 IEEE Cledo Brunetti Award. He is also a fellow of SPIE and the 2023 recipient of the society’s Frits Zernike Award for Microlithography.