Megavolt Arsenic Implantation into Silicon

P.F. Byrne

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M82/62
August 1982

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1982/ERL-m-82-62.pdf

BibTeX citation:

@techreport{Byrne:M82/62,
    Author = {Byrne, P.F.},
    Title = {Megavolt Arsenic Implantation into Silicon},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1982},
    Month = {Aug},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1982/28536.html},
    Number = {UCB/ERL M82/62}
}

EndNote citation:

%0 Report
%A Byrne, P.F.
%T Megavolt Arsenic Implantation into Silicon
%I EECS Department, University of California, Berkeley
%D 1982
%@ UCB/ERL M82/62
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1982/28536.html
%F Byrne:M82/62