P.F. Byrne

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M82/62

, 1982

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1982/ERL-m-82-62.pdf

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BibTeX citation:

@techreport{Byrne:M82/62,
    Author= {Byrne, P.F.},
    Title= {Megavolt Arsenic Implantation into Silicon},
    Year= {1982},
    Month= {Aug},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1982/28536.html},
    Number= {UCB/ERL M82/62},
}

EndNote citation:

%0 Report
%A Byrne, P.F. 
%T Megavolt Arsenic Implantation into Silicon
%I EECS Department, University of California, Berkeley
%D 1982
%@ UCB/ERL M82/62
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1982/28536.html
%F Byrne:M82/62