Specifying Integrated Circuit Photolithography Processes Using Heuristic and Algorithmic Techniques (Computer-Aided Design, Expert System)

Michael F. Klein

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M85/73

1985

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/Archive/ERL-85-73.pdf

Advisors: David A. Hodges

BibTeX citation:

@phdthesis{Klein:M85/73,
    Author= {Klein, Michael F.},
    Title= {Specifying Integrated Circuit Photolithography Processes Using Heuristic and Algorithmic Techniques (Computer-Aided Design, Expert System)},
    School= {EECS Department, University of California, Berkeley},
    Year= {1985},
    Month= {Sep},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/560.html},
    Number= {UCB/ERL M85/73},
}

EndNote citation:

%0 Thesis
%A Klein, Michael F. 
%T Specifying Integrated Circuit Photolithography Processes Using Heuristic and Algorithmic Techniques (Computer-Aided Design, Expert System)
%I EECS Department, University of California, Berkeley
%D 1985
%@ UCB/ERL M85/73
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1985/560.html
%F Klein:M85/73