MOS Processes in the Microfabrication Laboratory

K. Voros and P.K. Ko

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M87/12
March 1987

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/ERL-87-12.pdf

BibTeX citation:

@techreport{Voros:M87/12,
    Author = {Voros, K. and Ko, P.K.},
    Title = {MOS Processes in the Microfabrication Laboratory},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1987},
    Month = {Mar},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/839.html},
    Number = {UCB/ERL M87/12}
}

EndNote citation:

%0 Report
%A Voros, K.
%A Ko, P.K.
%T MOS Processes in the Microfabrication Laboratory
%I EECS Department, University of California, Berkeley
%D 1987
%@ UCB/ERL M87/12
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/839.html
%F Voros:M87/12