K. Voros and P.K. Ko

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M87/12

, 1987

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/ERL-87-12.pdf

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BibTeX citation:

@techreport{Voros:M87/12,
    Author= {Voros, K. and Ko, P.K.},
    Title= {MOS Processes in the Microfabrication Laboratory},
    Year= {1987},
    Month= {Mar},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/839.html},
    Number= {UCB/ERL M87/12},
}

EndNote citation:

%0 Report
%A Voros, K. 
%A Ko, P.K. 
%T MOS Processes in the Microfabrication Laboratory
%I EECS Department, University of California, Berkeley
%D 1987
%@ UCB/ERL M87/12
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/839.html
%F Voros:M87/12