K-K. Lin

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M87/50

, 1987

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/ERL-87-50.pdf

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BibTeX citation:

@techreport{Lin:M87/50,
    Author= {Lin, K-K.},
    Title= {An Expert System for Polysilicon Recipe Generation},
    Year= {1987},
    Month= {Jul},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/914.html},
    Number= {UCB/ERL M87/50},
}

EndNote citation:

%0 Report
%A Lin, K-K. 
%T An Expert System for Polysilicon Recipe Generation
%I EECS Department, University of California, Berkeley
%D 1987
%@ UCB/ERL M87/50
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/914.html
%F Lin:M87/50