An Expert System for Polysilicon Recipe Generation

K-K. Lin

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M87/50
July 1987

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/ERL-87-50.pdf

BibTeX citation:

@techreport{Lin:M87/50,
    Author = {Lin, K-K.},
    Title = {An Expert System for Polysilicon Recipe Generation},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1987},
    Month = {Jul},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/914.html},
    Number = {UCB/ERL M87/50}
}

EndNote citation:

%0 Report
%A Lin, K-K.
%T An Expert System for Polysilicon Recipe Generation
%I EECS Department, University of California, Berkeley
%D 1987
%@ UCB/ERL M87/50
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/914.html
%F Lin:M87/50