Cavity Perturbation Measurement of Plasma Density in Complex Geometry R.F. Discharges
R.M. Moroney and Allan J. Lichtenberg and Michael A. Lieberman
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M88/81
, 1988
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-81.pdf
BibTeX citation:
@techreport{Moroney:M88/81, Author= {Moroney, R.M. and Lichtenberg, Allan J. and Lieberman, Michael A.}, Title= {Cavity Perturbation Measurement of Plasma Density in Complex Geometry R.F. Discharges}, Year= {1988}, Month= {Dec}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1134.html}, Number= {UCB/ERL M88/81}, }
EndNote citation:
%0 Report %A Moroney, R.M. %A Lichtenberg, Allan J. %A Lieberman, Michael A. %T Cavity Perturbation Measurement of Plasma Density in Complex Geometry R.F. Discharges %I EECS Department, University of California, Berkeley %D 1988 %@ UCB/ERL M88/81 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1134.html %F Moroney:M88/81