J.K. Gamelin

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M89/71

, 1989

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-71.pdf

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BibTeX citation:

@techreport{Gamelin:M89/71,
    Author= {Gamelin, J.K.},
    Title= {Simulation of Topography Scattering for Optical Lithography with the Connection Machine},
    Year= {1989},
    Month= {Jun},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1259.html},
    Number= {UCB/ERL M89/71},
}

EndNote citation:

%0 Report
%A Gamelin, J.K. 
%T Simulation of Topography Scattering for Optical Lithography with the Connection Machine
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/71
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1259.html
%F Gamelin:M89/71