Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges
A.H. Sato
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M90/59
1990
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-59.pdf
BibTeX citation:
@techreport{Sato:M90/59,
Author= {Sato, A.H.},
Title= {Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges},
Year= {1990},
Month= {Jul},
Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1520.html},
Number= {UCB/ERL M90/59},
}
EndNote citation:
%0 Report %A Sato, A.H. %T Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/59 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1520.html %F Sato:M90/59