Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges

A.H. Sato

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M90/59

1990

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/Archive/ERL-90-59.pdf

BibTeX citation:

@techreport{Sato:M90/59,
    Author= {Sato, A.H.},
    Title= {Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges},
    Year= {1990},
    Month= {Jul},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1520.html},
    Number= {UCB/ERL M90/59},
}

EndNote citation:

%0 Report
%A Sato, A.H. 
%T Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/59
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1520.html
%F Sato:M90/59