Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges
A.H. Sato
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M90/59
, 1990
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-59.pdf
BibTeX citation:
@techreport{Sato:M90/59, Author= {Sato, A.H.}, Title= {Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges}, Year= {1990}, Month= {Jul}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1520.html}, Number= {UCB/ERL M90/59}, }
EndNote citation:
%0 Report %A Sato, A.H. %T Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/59 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1520.html %F Sato:M90/59