R.A. Stewart and Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/14
February 1991
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-14.pdf
BibTeX citation:
@techreport{Stewart:M91/14, Author = {Stewart, R.A. and Lieberman, Michael A.}, Title = {Model of Plasma Immersion Ion Implantation for Voltage Pulses with Finite Rise- and Fall-Times}, Institution = {EECS Department, University of California, Berkeley}, Year = {1991}, Month = {Feb}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1702.html}, Number = {UCB/ERL M91/14} }
EndNote citation:
%0 Report %A Stewart, R.A. %A Lieberman, Michael A. %T Model of Plasma Immersion Ion Implantation for Voltage Pulses with Finite Rise- and Fall-Times %I EECS Department, University of California, Berkeley %D 1991 %@ UCB/ERL M91/14 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1702.html %F Stewart:M91/14