R.A. Stewart and Michael A. Lieberman

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M91/14

, 1991

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-14.pdf

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BibTeX citation:

@techreport{Stewart:M91/14,
    Author= {Stewart, R.A. and Lieberman, Michael A.},
    Title= {Model of Plasma Immersion Ion Implantation for Voltage Pulses with Finite Rise- and Fall-Times},
    Year= {1991},
    Month= {Feb},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1702.html},
    Number= {UCB/ERL M91/14},
}

EndNote citation:

%0 Report
%A Stewart, R.A. 
%A Lieberman, Michael A. 
%T Model of Plasma Immersion Ion Implantation for Voltage Pulses with Finite Rise- and Fall-Times
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/14
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1702.html
%F Stewart:M91/14