The Selective Epitaxy of Silicon at Low Temperatures

Jen-Chung Lou

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/70
August 1991

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-70.pdf

Advisor: William G. Oldham

BibTeX citation:

@phdthesis{Lou:M91/70,
    Author = {Lou, Jen-Chung},
    Title = {The Selective Epitaxy of Silicon at Low Temperatures},
    School = {EECS Department, University of California, Berkeley},
    Year = {1991},
    Month = {Aug},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1796.html},
    Number = {UCB/ERL M91/70}
}

EndNote citation:

%0 Thesis
%A Lou, Jen-Chung
%T The Selective Epitaxy of Silicon at Low Temperatures
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/70
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1796.html
%F Lou:M91/70