The Selective Epitaxy of Silicon at Low Temperatures
Jen-Chung Lou
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M91/70
, 1991
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/ERL-91-70.pdf
Advisors: William G. Oldham
BibTeX citation:
@phdthesis{Lou:M91/70, Author= {Lou, Jen-Chung}, Title= {The Selective Epitaxy of Silicon at Low Temperatures}, School= {EECS Department, University of California, Berkeley}, Year= {1991}, Month= {Aug}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1796.html}, Number= {UCB/ERL M91/70}, }
EndNote citation:
%0 Thesis %A Lou, Jen-Chung %T The Selective Epitaxy of Silicon at Low Temperatures %I EECS Department, University of California, Berkeley %D 1991 %@ UCB/ERL M91/70 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1991/1796.html %F Lou:M91/70