An Introduction to Semiconductor Manufacturing and Markets

P.K. Schank and Lawrence A. Rowe

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M92/35

1992

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/Archive/ERL-92-35.pdf

BibTeX citation:

@techreport{Schank:M92/35,
    Author= {Schank, P.K. and Rowe, Lawrence A.},
    Title= {An Introduction to Semiconductor Manufacturing and Markets},
    Year= {1992},
    Month= {Apr},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2000.html},
    Number= {UCB/ERL M92/35},
}

EndNote citation:

%0 Report
%A Schank, P.K. 
%A Rowe, Lawrence A. 
%T An Introduction to Semiconductor Manufacturing and Markets
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/35
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2000.html
%F Schank:M92/35