An Introduction to Semiconductor Manufacturing and Markets
P.K. Schank and Lawrence A. Rowe
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M92/35
, 1992
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-35.pdf
BibTeX citation:
@techreport{Schank:M92/35, Author= {Schank, P.K. and Rowe, Lawrence A.}, Title= {An Introduction to Semiconductor Manufacturing and Markets}, Year= {1992}, Month= {Apr}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2000.html}, Number= {UCB/ERL M92/35}, }
EndNote citation:
%0 Report %A Schank, P.K. %A Rowe, Lawrence A. %T An Introduction to Semiconductor Manufacturing and Markets %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/35 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2000.html %F Schank:M92/35