J. Thomson
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/118
October 1992
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-118.pdf
BibTeX citation:
@techreport{Thomson:M92/118, Author = {Thomson, J.}, Title = {Sequential Optimization in Semiconductor Manufacturing}, Institution = {EECS Department, University of California, Berkeley}, Year = {1992}, Month = {Oct}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2194.html}, Number = {UCB/ERL M92/118} }
EndNote citation:
%0 Report %A Thomson, J. %T Sequential Optimization in Semiconductor Manufacturing %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/118 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2194.html %F Thomson:M92/118