Sequential Optimization in Semiconductor Manufacturing
J. Thomson
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M92/118
1992
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-118.pdf
BibTeX citation:
@techreport{Thomson:M92/118,
Author= {Thomson, J.},
Title= {Sequential Optimization in Semiconductor Manufacturing},
Year= {1992},
Month= {Oct},
Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2194.html},
Number= {UCB/ERL M92/118},
}
EndNote citation:
%0 Report %A Thomson, J. %T Sequential Optimization in Semiconductor Manufacturing %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/118 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2194.html %F Thomson:M92/118