An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation

J.J. Helmsen

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/125
November 1992

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-125.pdf

BibTeX citation:

@techreport{Helmsen:M92/125,
    Author = {Helmsen, J.J.},
    Title = {An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    Month = {Nov},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2210.html},
    Number = {UCB/ERL M92/125}
}

EndNote citation:

%0 Report
%A Helmsen, J.J.
%T An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/125
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2210.html
%F Helmsen:M92/125