An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation

J.J. Helmsen

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M92/125

1992

This publication is archived. It is kept only for reference purposes, so it is no longer being updated and may not meet accessibility standards. If you need this content in a different format, please email webteam@eecs.berkeley.edu.

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/Archive/ERL-92-125.pdf

BibTeX citation:

@techreport{Helmsen:M92/125,
    Author= {Helmsen, J.J.},
    Title= {An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation},
    Year= {1992},
    Month= {Nov},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2210.html},
    Number= {UCB/ERL M92/125},
}

EndNote citation:

%0 Report
%A Helmsen, J.J. 
%T An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/125
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2210.html
%F Helmsen:M92/125