An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation
J.J. Helmsen
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M92/125
1992
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-125.pdf
BibTeX citation:
@techreport{Helmsen:M92/125,
Author= {Helmsen, J.J.},
Title= {An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation},
Year= {1992},
Month= {Nov},
Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2210.html},
Number= {UCB/ERL M92/125},
}
EndNote citation:
%0 Report %A Helmsen, J.J. %T An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/125 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2210.html %F Helmsen:M92/125