Crid Yu

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M96/47

, 1996

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/ERL-96-47.pdf

Advisors: Costas J. Spanos

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BibTeX citation:

@phdthesis{Yu:M96/47,
    Author= {Yu, Crid},
    Title= {Integrated Circuit Process Design for Manufacturability Using Statistical Metrology},
    School= {EECS Department, University of California, Berkeley},
    Year= {1996},
    Month= {Aug},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3059.html},
    Number= {UCB/ERL M96/47},
}

EndNote citation:

%0 Thesis
%A Yu, Crid 
%T Integrated Circuit Process Design for Manufacturability Using Statistical Metrology
%I EECS Department, University of California, Berkeley
%D 1996
%@ UCB/ERL M96/47
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1996/3059.html
%F Yu:M96/47