J. Musacchio

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M98/79

, 1998

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/ERL-98-79.pdf

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BibTeX citation:

@techreport{Musacchio:M98/79,
    Author= {Musacchio, J.},
    Title= {Run to Run Control in Semiconductor Manufacturing},
    Year= {1998},
    Month= {Nov},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3564.html},
    Number= {UCB/ERL M98/79},
}

EndNote citation:

%0 Report
%A Musacchio, J. 
%T Run to Run Control in Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 1998
%@ UCB/ERL M98/79
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1998/3564.html
%F Musacchio:M98/79