T.T. Nguyen

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M00/27

, 2000

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-27.pdf


BibTeX citation:

@techreport{Nguyen:M00/27,
    Author= {Nguyen, T.T.},
    Title= {The Impact of Line Edge Roughness on 100 nm MOSFET Devices},
    Year= {2000},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3844.html},
    Number= {UCB/ERL M00/27},
}

EndNote citation:

%0 Report
%A Nguyen, T.T. 
%T The Impact of Line Edge Roughness on 100 nm MOSFET Devices
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/27
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3844.html
%F Nguyen:M00/27