Process Variation Analysis for MEMS Design

L. Schenato and W-C. Wu and Laurent El Ghaoui and Kristofer Pister

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M00/44

2000

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/Archive/ERL-00-44.pdf

BibTeX citation:

@techreport{Schenato:M00/44,
    Author= {Schenato, L. and Wu, W-C. and El Ghaoui, Laurent and Pister, Kristofer},
    Title= {Process Variation Analysis for MEMS Design},
    Year= {2000},
    Month= {Aug},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3875.html},
    Number= {UCB/ERL M00/44},
}

EndNote citation:

%0 Report
%A Schenato, L. 
%A Wu, W-C. 
%A El Ghaoui, Laurent 
%A Pister, Kristofer 
%T Process Variation Analysis for MEMS Design
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/44
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3875.html
%F Schenato:M00/44