Process Variation Analysis for MEMS Design
L. Schenato and W-C. Wu and Laurent El Ghaoui and Kristofer Pister
EECS Department, University of California, Berkeley
Technical Report No. UCB/ERL M00/44
, 2000
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-44.pdf
BibTeX citation:
@techreport{Schenato:M00/44, Author= {Schenato, L. and Wu, W-C. and El Ghaoui, Laurent and Pister, Kristofer}, Title= {Process Variation Analysis for MEMS Design}, Year= {2000}, Month= {Aug}, Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3875.html}, Number= {UCB/ERL M00/44}, }
EndNote citation:
%0 Report %A Schenato, L. %A Wu, W-C. %A El Ghaoui, Laurent %A Pister, Kristofer %T Process Variation Analysis for MEMS Design %I EECS Department, University of California, Berkeley %D 2000 %@ UCB/ERL M00/44 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3875.html %F Schenato:M00/44