Process Variation Analysis for MEMS Design

L. Schenato, W-C. Wu, Laurent El Ghaoui and Kristofer Pister

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M00/44
August 2000

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/ERL-00-44.pdf

BibTeX citation:

@techreport{Schenato:M00/44,
    Author = {Schenato, L. and Wu, W-C. and El Ghaoui, Laurent and Pister, Kristofer},
    Title = {Process Variation Analysis for MEMS Design},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {2000},
    Month = {Aug},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3875.html},
    Number = {UCB/ERL M00/44}
}

EndNote citation:

%0 Report
%A Schenato, L.
%A Wu, W-C.
%A El Ghaoui, Laurent
%A Pister, Kristofer
%T Process Variation Analysis for MEMS Design
%I EECS Department, University of California, Berkeley
%D 2000
%@ UCB/ERL M00/44
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2000/3875.html
%F Schenato:M00/44