The economic impact of metrology methods in semiconductor manufacturing

Payman Jula

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M01/22

2001

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http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/Archive/ERL-01-22.pdf

BibTeX citation:

@mastersthesis{Jula:M01/22,
    Author= {Jula, Payman},
    Title= {The economic impact of metrology methods in semiconductor manufacturing},
    School= {EECS Department, University of California, Berkeley},
    Year= {2001},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/9583.html},
    Number= {UCB/ERL M01/22},
}

EndNote citation:

%0 Thesis
%A Jula, Payman 
%T The economic impact of metrology methods in semiconductor manufacturing
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/22
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/9583.html
%F Jula:M01/22