The economic impact of metrology methods in semiconductor manufacturing

Payman Jula

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M01/22
May 2001

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/ERL-01-22.pdf

BibTeX citation:

@mastersthesis{Jula:M01/22,
    Author = {Jula, Payman},
    Title = {The economic impact of metrology methods in semiconductor manufacturing},
    School = {EECS Department, University of California, Berkeley},
    Year = {2001},
    Month = {May},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/9583.html},
    Number = {UCB/ERL M01/22}
}

EndNote citation:

%0 Thesis
%A Jula, Payman
%T The economic impact of metrology methods in semiconductor manufacturing
%I EECS Department, University of California, Berkeley
%D 2001
%@ UCB/ERL M01/22
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2001/9583.html
%F Jula:M01/22