L. Voros and S. Parsa

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M02/39

, 2002

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/ERL-02-39.pdf

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BibTeX citation:

@techreport{Voros:M02/39,
    Author= {Voros, L. and Parsa, S.},
    Title= {Six-Inch CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory},
    Year= {2002},
    Month= {Dec},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/4038.html},
    Number= {UCB/ERL M02/39},
}

EndNote citation:

%0 Report
%A Voros, L. 
%A Parsa, S. 
%T Six-Inch CMOS Baseline Process in the UC Berkeley Microfabrication Laboratory
%I EECS Department, University of California, Berkeley
%D 2002
%@ UCB/ERL M02/39
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2002/4038.html
%F Voros:M02/39