Runzi Chang
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M04/11
May 2004
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/ERL-04-11.pdf
Advisor: Costas J. Spanos
BibTeX citation:
@phdthesis{Chang:M04/11, Author = {Chang, Runzi}, Title = {Integrated CMP Metrology and Modeling with Respect to Circuit Performance}, School = {EECS Department, University of California, Berkeley}, Year = {2004}, Month = {May}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4210.html}, Number = {UCB/ERL M04/11} }
EndNote citation:
%0 Thesis %A Chang, Runzi %T Integrated CMP Metrology and Modeling with Respect to Circuit Performance %I EECS Department, University of California, Berkeley %D 2004 %@ UCB/ERL M04/11 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4210.html %F Chang:M04/11