Runzi Chang

EECS Department, University of California, Berkeley

Technical Report No. UCB/ERL M04/11

, 2004

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/ERL-04-11.pdf

Advisors: Costas J. Spanos

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BibTeX citation:

@phdthesis{Chang:M04/11,
    Author= {Chang, Runzi},
    Title= {Integrated CMP Metrology and Modeling with Respect to Circuit Performance},
    School= {EECS Department, University of California, Berkeley},
    Year= {2004},
    Month= {May},
    Url= {http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4210.html},
    Number= {UCB/ERL M04/11},
}

EndNote citation:

%0 Thesis
%A Chang, Runzi 
%T Integrated CMP Metrology and Modeling with Respect to Circuit Performance
%I EECS Department, University of California, Berkeley
%D 2004
%@ UCB/ERL M04/11
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2004/4210.html
%F Chang:M04/11