Ph.D. Dissertations - David Attwood
Mask Roughness Induced LER in EUV Lithography
Brittany Marie McClinton [2011]
Resolution Characterization and Nanofabrication for Soft X-Ray Zone Plate Microscopy
Weilun Chao [2005]
Tunable Coherent Radiation at Soft X-Ray Wavelengths: Generation and Interferometric Applications
Kristine M. Rosfjord [2004]
Coherence Techniques at Extreme Ultraviolet Wavelengths
Chang Chang [2002]
Optical Constants of Materials in the EUV/Soft X-Ray Region for Multilayer Mirror Applications
Regina Soufli [1997]
Grating-Based Soft X-Ray Spatial Frequency Multiplication
Max Wei [1995]
Reflective Masks for Extreme Ultraviolet Lithography
Khanh B. Nguyen [1994]