Micro/Nano Electro Mechanical Systems (MEMS)



  • Physical Sensors

    Micro- and nano-scale sensors for acceleration, rotation, velocity, pressure, stress, temperature, based on a variety of physical principles, from solid-body or gaseous mechanical displacement, to expansion/contraction, to atomic spin reorientation

  • Chemical Sensors

    Micro- and nano-scale sensors for liquids and vapors using a variety of methods to reduce false alarm rates and maximize sensitivity, from micro-scale chromatography, to nanomechanically resonant gravimetric sensors, to massively parallel ion trap mass spectrometers, to photoacoustic IR and other spectroscopic methods

  • Bio Sensors

    Micro- and nano-scale sensors for blood sugar, disease, viruses, DNA analyses, and other biological analytes, employing such mechanisms and concepts as electrophoresis, micro-scale pumping and valving, and channels for cell sorting

  • Micromechanical Signal Processors and RF MEMS

    Micromechanical circuits and mechanisms for frequency generation and filtering, mixing, amplification, and computation, for such applications as (wireless) communications, antennas, A/D converters, memory, and logic, and employing micromachined structures, interconnections of moving low-loss and high-Q mechanical structures to process signals in the mechanical domain; and atomic state energy differences to specify accurate frequencies

  • Optical MEMS

    Micro-scale concepts and mechanisms for spectroscopic sensors and analysis tools, optical tables, chip-scale atomic clocks, employing such technologies as micro-scale lenses, gratings, mirrors, thermally isolating gimbals, on-chip lasers (e.g., VCSEL's), mechanical photodetectors/electron counters

  • Micro/Nano Fabrication

    Top down surface and bulk micromachining in various materials, from polysilicon, to electroplated metals, to polymers; bottom up micro- and nano-scale construction methods; micro-assembly methods (e.g., fluidic micro-assembly, directed self-assembly); single-chip integration of MEMS with transistors; wafer-scale bonding

  • Microfluidics

    Micro- and nano-scale mechanisms and technologies for moving (i.e., pumping), mixing, and reacting fluids, for such applications as micro-chemical reactors; fuel cells, microengines, and other power generating devices; chemical, bio, and physical sensors; efficient on-chip heating and cooling

  • BioMEMS

    Micro- and nano-scale mechanisms for morphogenesis, neural stimulation, cell interrogation, brain-machine interfaces, and cochlear prosthesis, employing such technique as directed evolution, bio-circuits for bottom up construction, arrayed micro-injectors for spatial control of biological input variables (i.e., fuels)

  • Micro-robotics

    Design, simulation, and fabrication technologies for millimeter-scale mobile autonomous systems; efficient actuation; energy scavenging, storage, and conversion; mechanisms for locomotion; system integration

  • Wireless Sensor Networks

    Low power sensors, sensor interfaces, computation, and communication circuits; energy scavenging; system integration; low power communication protocols

Research Centers




Faculty Awards

  • National Academy of Engineering (NAE) Member: Tsu-Jae King Liu, 2017. Richard M. White, 1994. Richard S. Muller, 1992.
  • Berkeley Citation: Richard S. Muller, 1994.
  • Sloan Research Fellow: Michael Lustig, 2013. Ali Javey, 2010.

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