Ignition Conditions for Peripheral Plasma in a Grounded Chamber Connected to a Dual Frequency Capactive Discharge (M05/10)
Michael A. Lieberman, Allan J. Lichtenberg, S. Kim and J. T. Gudmundsson

Effect of Ar Addition to an O2 Plasma in a Large Area Plasma Source: O2/Ar Mixture Plasma Modeling and Photoresist Etching (M01/1)
K. Takechi and Michael A. Lieberman

Effect of Ion Energy on Photoresist Etching in an Inductively Coupled Large Area Plasma Source (LAPS) (M00/58)
K. Takechi and Michael A. Lieberman

Kinetics of Photoresist Etching in a Large Area Plasma Source (LAPS) (M00/40)
K. Takechi and Michael A. Lieberman

An Oxygen Discharge Model for a Large Area Plasma Source (LAPS) (M00/33)
K. Takechi and Michael A. Lieberman

Operation of a Large Area Plasma Source (LAPS) with Oxygen Gas (M00/15)
K. Takechi and Michael A. Lieberman

Instabilities in Low Pressure Inductive Discharges with Attaching Gases (M99/30)
M.A. Lieberman, A.J. Lichtenberg and A.M. Marakhtanov

Ion Energy Distributions in RF Sheaths; Review, Analysis and Simulation (M98/62)
E. Kawamura, V. Vahedi, Michael A. Lieberman and Charles K. (Ned) Birdsall

A Traveling Wave Driven, Inductively Coupled Large Area Plasma Source (M97/68)
Y. Wu and Michael A. Lieberman

From Fermi Acceleration to Collisionless Discharge Heating (M97/65)
Michael A. Lieberman and V.A. Godyak

Global Model for High Pressure Electronegative Radio-Frequency Discharges (M96/23)
Y.T. Lee, Michael A. Lieberman, Allan J. Lichtenberg, F. Bose, H. Baltes and R. Patrick

RF Plasma Potential and Surface Temperature Measurements in an Inductively Coupled Plasma Source (M96/14)
G. Gregori and Michael A. Lieberman

A Simple Transformer Model Applied to a Planar Inductive Plasma Discharge (M96/3)
J.T. Gudmundsson and Michael A. Lieberman

Measurement of Synchronization in Noisy and Chaotic Dynamical Systems (M95/103)
P. Khoury, Michael A. Lieberman and Allan J. Lichtenberg

Modeling Electronegative Discharges at Low Pressure (M95/97)
I. Kouznetsov, Allan J. Lichtenberg and Michael A. Lieberman

Global Models of Pulse-Power Modulated High Density, Low Pressure Discharges (M95/83)
Michael A. Lieberman and S. Ashida

Simulation and Analysis of a Large Area Plasma Source (M95/65)
V.P. Gopinath and Michael A. Lieberman

Experimental Modeling of a Traveling-Wave- Excited Inductively Driven Coil for a Large Area Plasma Source for Flat Panel Processing (M95/60)
Y. Wu and Michael A. Lieberman

Review of Ion Energy Distributions in Capacitively Coupled RF Plasma Reactors (M95/49)
E. Kawamura, V. Vahedi, Michael A. Lieberman and Charles K. (Ned) Birdsall

Role of Etch Products in Polysilicon Etching in a High Density Chlorine Discharge (M95/9)
C. Lee, D.B. Graves and Michael A. Lieberman

Characterization at Different Aspect Ratios (Radius/Length) of a Radio Frequency Inductively Coupled Plasma Source (M94/56)
P.N. Wainman, Michael A. Lieberman, Allan J. Lichtenberg, R.A. Stewart and C. Lee

Spatially Averaged (Global) Model of the Time Modulated High Density Argon Plasmas (M94/50)
S. Ashida, Michael A. Lieberman and C. Lee

Global Model of Ar, O_2, Cl_2, and Ar/O_2 High Density Plasma Discharges (M94/49)
C. Lee and Michael A. Lieberman

Time Scale to Ergodicity in the FPU System (M93/92)
J. De Luca, Allan J. Lichtenberg and Michael A. Lieberman

Modeling Electronegative Plasma Discharges (M93/74)
Allan J. Lichtenberg, V. Vahedi, Michael A. Lieberman and T. Rognlien

Global Model of Plasma Chemistry in a High Density Oxygen Discharge (M93/54)
C. Lee, D.B. Graves, Michael A. Lieberman and D.W. Hess

Arnold Diffusion in Many Dimensions (M93/13)
B.P. Wood, Allan J. Lichtenberg and Michael A. Lieberman

Design of High Density Plasma Sources for Materials Processing (M93/3)
Michael A. Lieberman and R.A. Gottscho

Verification of Frequency Scaling Laws for Capacitive RF Discharges Using Two- Dimensional Simulations (M92/146)
V. Vahedi, Charles K. (Ned) Birdsall, Michael A. Lieberman, G. DiPeso and T.D. Rognlien

Analytic Model of the Ion Angular Distribution in a Collisional Sheath (M92/114)
V. Vahedi, R.A. Stewart and Michael A. Lieberman

Plasma and Gas Phase Kinetics of High Density SF_6 Discharges (M92/95)
C. Lee, D.W. Hess and Michael A. Lieberman

On Synchronization of Regular and Chaotic Systems (M92/72)
M. de Sousa Vieira, Allan J. Lichtenberg and Michael A. Lieberman

RF Discharge Impedance Measurements and Comparison to a Discharge Model (M92/34)
A.H. Sato and Michael A. Lieberman

Electron Cyclotron Resonance Etching of Silylated Photoresist (M92/25)
B. Lynch, S. Das, Michael A. Lieberman and D.W. Hess

Self-Synchronization of Many Coupled Oscillators (M92/20)
M. de Sousa Vieira, Allan J. Lichtenberg and Michael A. Lieberman

Numerical and Experimental Studies of Self-Synchronization and Synchronized Chaos (M92/5)
M. de Sousa Vieira, P. Khoury, Allan J. Lichtenberg, Michael A. Lieberman, W. Wonchoba, J. Gullicksen, J.Y. Huang, R. Sherman and M. Steinberg

Plasma Immersion Ion Implantation (PIII) for Integrated Circuit Manufacturing: Fourth Quarterly Progress Report (M91/116)
Nathan W. Cheung, Michael A. Lieberman, C.A. Pico, R.A. Stewart, J. Tao, M.H. Kiang, C. Yu, V. Vahedi, B. Troyanovsky, W. En, E. Jones and J. Benasso

Self-Consistent Electron Cyclotron Resonance Absorption in a Plasma with Varying Parameters (M91/114)
M.C. Williamson, Allan J. Lichtenberg and Michael A. Lieberman

Plasma Etching of CVD Tungsten Using ECR Discharges (M91/92)
C. Lee, D.W. Hess and Michael A. Lieberman

Secure Communications by Synchronization to a Chaotic Signal (M91/89)
J. Gullicksen, M. de Sousa Vieira, Michael A. Lieberman, R. Sherman, Allan J. Lichtenberg, J.Y. Huang, W. Wonchoba, M. Steinberg and P. Khoury

Plasma Immersion Ion Implantation (PIII) for Integrated Circuit Manufacturing: Third Quarterly Progress Report (M91/86)
Nathan W. Cheung, Michael A. Lieberman, C.A. Pico, R.A. Stewart, J. Tao, M.H. Kiang, C. Yu, V. Vahedi, B. Troyanovsky, W. En, E. Jones and J. Benasso

A Two-Coupled-Sheath Model for the Conduction of Current Through Asymmetric Parallel Plate RF Discharges (M91/81)
A.H. Sato and Michael A. Lieberman

Chaos and the Approach to Equilibrium in the Discrete Sine-Gordon Equation (M91/76)
C.G. Goedde, Allan J. Lichtenberg and Michael A. Lieberman

Plasma Immersion Ion Implantation (PIII) for Integrated Circuit Manufacturing: Second Quarterly Progress Report (M91/63)
N.W. Cheung, Michael A. Lieberman, C.A. Pico, R.A. Stewart, J. Tao, M.H. Kiang, C. Yu, V. Vahedi, B. Troyanovsky, W. En, E. Jones and J. Benasso

Plasma Immersion Ion Implantation (PIII) for Integrated Circuit Manufacturing (M91/26)
Michael A. Lieberman and Nathan W. Cheung

Model of Plasma Immersion Ion Implantation for Voltage Pulses with Finite Rise- and Fall-Times (M91/14)
R.A. Stewart and Michael A. Lieberman

Nonlinear Dynamics of Self-Synchronizing Systems (M91/6)
M. de Sousa Vieira, Allan J. Lichtenberg and Michael A. Lieberman

Effects of DC Bias on the Kinetics and Electrical Properties of Silicon Dioxide Grown in an Electron Cyclotron Resonance Plasma (M91/5)
D.A. Carl, D.W. Hess, Michael A. Lieberman, T.D. Nguyen and R. Gronsky

Characterization of the Processing Plasma in an Engineering Prototype Reactor for Plasma Immersion Ion Implantation (M90/100)
R.A. Stewart, X.Y. Qian, D.A. Carl, B. Lake, Jr., J. Benasso, R. Lynch, C.A. Pico, Michael A. Lieberman and Nathan W. Cheung

Plasma Immersion Ion Implantation for VLSI Fabrication (M90/84)
X.Y. Qian, Nathan W. Cheung and Michael A. Lieberman

Sheath Motion in a Capacitively Coupled Radio Frequency Discharges (M90/83)
B.P. Wood, Michael A. Lieberman and Allan J. Lichtenberg

Axial RF Electric Field Intensity and Ion Density During Low to High Mode Transition in Argon Electron Cyclotron Resonance Discharges (M90/81)
D.A. Carl, M.C. Williamson, Michael A. Lieberman and Allan J. Lichtenberg

A One Dimensional Collisional Model for Plasma Immersion Ion Implantation (M90/60)
V. Vahedi, Michael A. Lieberman, M.V. Alves, J.P. Verboncoeur and Charles K. (Ned) Birdsall

Model of Magnetically Enhanced Capacitive RF Discharges (M90/58)
Michael A. Lieberman, Allan J. Lichtenberg and S.E. Savas

Sheath Voltage Ratio for Asymmetric RF Discharges (M90/56)
M.V. Alves, Michael A. Lieberman, V. Vahedi and Charles K. (Ned) Birdsall

Electron Beam Probe Measurements of Electric Fields in RF Discharges (M90/49)
A.H. Sato and Michael A. Lieberman

Arnold Diffusion in Weakly Coupled Standard Maps (M90/42)
B.P. Wood, Allan J. Lichtenberg and Michael A. Lieberman

Kinetics of Photoresist Etching in an Electron Cyclotron Resonance Plasma (M90/25)
D.A. Carl, D.W. Hess and Michael A. Lieberman

Plasma Immersion Ion Implantation for Impurity Gettering in Silicon Plasma Immersion Ion Implantation and Dose Loss in Impurity Gettering Experiment (M90/23)
H. Wong, X.Y. Qian, D. Carl, Nathan W. Cheung, Michael A. Lieberman, I.G. Brown and K.M. Yu

Theory of a Helical Resonator Plasma Source (M90/10)
Michael A. Lieberman, Allan J. Lichtenberg and D.L. Flamm

Bias Voltage in Finite Length, Cylindrical and Coaxial RF Discharges (M89/121)
Michael A. Lieberman and S.E. Savas

Oxidation of Silicon in an ECR Oxygen Plasma: Kinetics, Physico-Chemical and Electrical Properties (M89/98)
D.A. Carl, D.W. Hess and Michael A. Lieberman

Parametric Instabilities in the Discrete Sine-Gordon Equation (M89/79)
C.G. Goedde, Allan J. Lichtenberg and Michael A. Lieberman

Secure Random Number Generation Using Chaotic Circuits (M89/38)
G.M. Bernstein and Michael A. Lieberman

Model of Plasma Immersion Ion Implantation (M89/30)
Michael A. Lieberman

Macroscopic Modelling of R.F. Plasma Discharges (M88/86)
G.R. Misium, Allan J. Lichtenberg and Michael A. Lieberman

Cavity Perturbation Measurement of Plasma Density in Complex Geometry R.F. Discharges (M88/81)
R.M. Moroney, Allan J. Lichtenberg and Michael A. Lieberman

Spherical Shell Model of an Asymmetric R.F. Discharge (M88/65)
Michael A. Lieberman

Basic RF Discharge Model (M87/65)
Michael A. Lieberman

Dynamics of a Collisional Capacitive R.F. Sheath (M88/62)
Michael A. Lieberman

Rays and Waves in a Periodically Perturbed Parallel Plate Waveguide (M88/59)
R.P. Ratowsky and Michael A. Lieberman

Self-Consistent Stochastic Electron Heating in Radio Frequency Discharges (M88/29)
C.G. Goedde, Allan J. Lichtenberg and Michael A. Lieberman

Axial Distribution of Optical Emission in a Planar Magnetron (M88/6)
L. Gu and Michael A. Lieberman

Diffusion in Two Dimensional Mappings (M88/5)
Allan J. Lichtenberg and Michael A. Lieberman

A Method for Obtaining a Canonical Hamiltonian for Nonlinear LC Circuits (M88/2)
G.M. Bernstein and Michael A. Lieberman

Analytical Solution for Capacitive R.F. Sheath (M87/71)
Michael A. Lieberman

Radial Current Distribution at a Planar Magnetron Cathode (M87/66)
A.E. Wendt, Michael A. Lieberman and H. Meuth

Nonlinear Dynamics of a Digital Phase Locked Loop (M87/59)
G.M. Bernstein, Michael A. Lieberman and Allan J. Lichtenberg

Transient Electrostatic Potentials Driven by Short-Pulse Electron Cyclotron Heating (M87/17)
Allan J. Lichtenberg, Michael A. Lieberman and R.H. Cohen

Collisional Treatment of the Trapped Particle Mode in Multi-Region Mirror Systems (M87/16)
H. Ramachandran, Allan J. Lichtenberg, Michael A. Lieberman and A.K. Sen

Electron Beam Time-of-Flight Potential Diagnostic (M87/4)
B.T. Archer, H. Meuth and Michael A. Lieberman

Axial Feedback Stabilization of Flute Modes for Mirror Machines (M86/101)
B.K. Kang, Michael A. Lieberman and A.K. Sen

The Effect of Quasi-Accelerator Modes on Diffusion (M86/100)
Allan J. Lichtenberg, Michael A. Lieberman and N.W. Murray

Stochasticity and Resonances in the Two Beam Accelerator (M86/76)
N.W. Murray and Michael A. Lieberman

Observation of a Potential Barrier Created by Electron Cyclotron Resonance Heating in a Multiple Mirror Plasma (M86/68)
C.P. Chang, Michael A. Lieberman, H. Meuth and Allan J. Lichtenberg

Experimental Observation of Wall Stabilization of Axisymmetric Mirrors at High Beta (M86/7)
R.M. Close, B.K. Kang, Allan J. Lichtenberg, Michael A. Lieberman and H. Meuth

Many-Dimensional Hamiltonian Systems (M85/74)
Michael A. Lieberman

Transient Chaotic Distributions in Dissipative Systems (M85/56)
K.Y. Tsang and Michael A. Lieberman

Observation of a Curvature Driven, Trapped Particle Mode Created by a Potential Barrier (M85/41)
J.C. Fernandez, C.P. Chang, Allan J. Lichtenberg, Michael A. Lieberman and H. Meuth

Synchronous Electron Beam Diagnostic for Plasma Etching Discharges (M85/38)
C.P. Chang and Michael A. Lieberman

Time-of-Flight He+ Beam Potential Diagnostic in Tandem Mirror (M85/34)
B.T. Archer and Michael A. Lieberman

Transient Chaos in Dissipatively Perturbed Near-Integrable Hamiltonian Systems (M85/26)
Michael A. Lieberman and K.Y. Tsang

Swept-Frequency, 8mm Microwave Interferomete for MXX (M84/104)
B.T. Archer, H. Meuth and Michael A. Lieberman

Corrections to Quasilinear Diffusion in Area Preserving Maps (M84/102)
N.W. Murray, Michael A. Lieberman and Allan J. Lichtenberg

Electron Beam Time-of-Flight Measurements of Plasma Potential in Tandem Mirrors (M84/92)
Michael A. Lieberman and C-P. Chang

Axial Feedback Stabilization of Flute Modes for Mirror Machines (M84/61)
B.K. Kang, Michael A. Lieberman and A.K. Sen

A Theoretical Study of ICRF Effects on Multiple Mirror Confinement (M84/19)
K.J. Doniger, Michael A. Lieberman and Allan J. Lichtenberg

Invariant Distribution on Strange Attractors in Highly Dissipative Systems (M84/13)
K-Y. Tsang and Michael A. Lieberman

Collisionless Diffusion in Two-Frequency Electron Cyclotron Resonance Heating (M83/65)
J.E. Howard, Allan J. Lichtenberg, Michael A. Lieberman and R.H. Cohen

Potential Barrier Decoupling of Stable and Unstable Regions of Average Minimum B Magnetic Mirrors (M83/22)
J. Fernandez, Allan J. Lichtenberg, Michael A. Lieberman and N. Benjamin

Analytical Calculation of Invariant Distributions on Strange Attractors (M83/19)
K.Y. Tsang and Michael A. Lieberman

Axial Plasma Injection and Shock Formation in Multiple Mirrors (M82/68)
R.V. Bravenec, A.J. Lichtenberg and M.A. Lieberman

Measurements of Plasma Confinement: The 10 Meter Multiple-Mirror Experiment (M82/66)
H.D. Price, A.J. Lichtenberg, M.A. Lieberman and M. Tuzsewski

Experimental Study of High Beta Ballooning Modes (M82/54)
H.D. Price, N.M.P. Benjamin, A.J. Lichtenberg and M.A. Lieberman

Nonadiabatic Scattering and Particle Flow in Multiple Mirrors (M82/47)
K.J. Doniger and M.A. Lieberman

Two-Frequency Fermi Mapping (M81/86)
J.E. Howard, M.A. Lieberman and A.J. Lichtenberg

Effects of Ambipolar Potential on Multiple Mirror Confinement (M81/66)
F. Najmabadi, A.J. Lichtenberg and M.A. Lieberman

Bifurcations of the Two-Frequency Fermi Mapping (M81/56)
J.E. Howard, M.A. Lieberman and A.J. Lichtenberg

Chaotic Motion Along Resonance Layers in Near-Integrable Hamiltonian Systems With Three or More Freedoms (M81/16)
M.A. Lieberman and J.L. Tennyson

Arnold Diffusion in Hamiltonian Systems with Three Degrees of Freedom (M79/83)
M.A. Lieberman

Viscous Plasma Flow in a Multiple-Mirror Configuration (M80/56)
R.V. Bravenec, A.J. Lichtenberg, M.A. Lieberman and H.L. Berk

Fermi Acceleration Revisited (M80/36)
A.J. Lichtenberg, M.A. Lieberman and R.H. Cohen

Radial Losses in High Beta Multiple Mirror Plasmas (M79/27)
M. Tuszewski and M.A. Lieberman

MHD Stabilization of Finite Beta Multiple Mirror Plasmas (M79/21)
M. Tuszewski, D. Price, M.A. Lieberman, R. Bravenec, K. Doniger, C. Hartman and A.J. Lichtenberg

Diffusion in Near-Integrable Hamiltonian Systems with Three Degrees of Freedom (M79/19)
J.L. Tennyson, M.A. Lieberman and A.J. Lichtenberg

Annual Report 1978 on Multiple Mirror Plasma Confinement (M78/78)
A.J. Lichtenberg and M.A. Lieberman

Multiple-Mirror Plasma Confinement (M541)
Allan J. Lichtenberg, Michael A. Lieberman and B. Grant Logan

Plasma Confinement in Multiple Mirror Systems I: Theory (M388)
A. Makhijani, A.J. Lichtenberg, M.A. Lieberman and B.G. Logan

Plasma Confinement in Multiple Mirror Systems II: Experiment and Reactor Calculation (M387)
B. Grant Logan, I.G. Brown, A.J. Lichtenberg and M.A. Lieberman

Theory of Electron Cyclotron Resonance Heating II: Long Time and Stochastic Effects (M306)
M.A. Lieberman and A.J. Lichtenberg

Theory of Electron Cyclotron Resonance Heating I: Short Time and Adiabatic Effects (M305)
F. Jaeger, A.J. Lichtenberg and M.A. Lieberman

Stochastic and Adiabatic Behavior of Particles Accelerated by Periodic Forces (M298)
M.A. Lieberman and A.J. Lichtenberg